Effect of Substrates and Thermal Treatments on Metalorganic Chemical Vapor Deposition-Grown Sb<sub>2</sub>Te<sub>3</sub> Thin Films
نویسندگان
چکیده
Antimony telluride (Sb2Te3) thin films were obtained by metalorganic chemical vapor deposition (MOCVD). The grown on crystalline Si(100) and Al2O3(0001) amorphous SiO2 a-Al2O3 substrates. Their structural properties compared with those of the Sb2Te3/Si(111) heterostructure. In addition to effect substrate, influence pre- post-growth thermal annealing is also presented. quality discussed comparing their morphological properties, such as roughness granularity, ascertaining crystallinity in-plane out-of-plane orientation.
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ژورنال
عنوان ژورنال: Crystal Growth & Design
سال: 2021
ISSN: ['1528-7483', '1528-7505']
DOI: https://doi.org/10.1021/acs.cgd.1c00508